Lumentum
Technology
ISO Class 5/6 cleanroom for e-beam facility – Northampton
Clean Room Construction (CRC) worked with Lumentum to design and build a bespoke cleanroom for their electron beam (e-beam) lithography facility.
The 95m² facility will be used for the manufacture of components used in the semiconductor industry. The suite, which occupies part of an area in an existing building, comprises ISO Class 5 and ISO Class 6 classification areas. Through innovative design, the facility operates with the close control temperature of +/- 0.1°C and a humidity control of +/- 5%.
The facility comprises two identical e-beam rooms connected by a central airlock. The cleanroom floors and walls are static dissipative and the suite’s humidity, temperature and room pressure are closely controlled and monitored by a dedicated BMS system connected to the client’s existing BMS network.
The project was completed on schedule with the company taking immediate occupancy to install the e-beam equipment.
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