Royal Holloway, University of London
New cleanroom for SuperFab nanofabrication facility - Egham, Surrey
Clean Room Construction (CRC) designed and built a 315m² ISO Class 5 cleanroom to house the world-class SuperFab nanofabrication facility at Royal Holloway, University of London.
SuperFab is a state-of-the-art university cleanroom and home of the UK Centre for Superconducting and Hybrid Quantum Systems (UK-CSQS).
Working directly for the university, CRC designed and built the turnkey facility, incorporating a photolithography area and close control e-beam area to +/- 0.1 degrees Celsius control band.
The cleanroom also included an anti-vibration foundation pad for process equipment and energy-efficient fume hoods and HVAC. CRC was responsible for liaising directly with the university's key process equipment suppliers throughout the design and construction project and providing assistance to the client with process equipment migration. CRC also handled the commissioning and validation of the facility.
SuperFab has been designed to serve the interests of academia and industry, with a focus on the development and small-scale industrial production of superconducting electronics and in particular, quantum electronics.
More project details available online at: http://www.royalholloway.ac.uk/physics/research/superfab
Contract Value: Circa £2 million